導模法長晶爐
所屬分類:
Ga2O3單晶生長設備
概要:
本設備主要用于氧化鎵(Ga2O3)單晶生長,將原料放在留有狹縫的模具中,熔液借虹吸作 用上升到模具頂部,受籽晶誘導結(jié)晶生長成單晶。
關鍵詞:
導模法長晶爐
導模法長晶爐
產(chǎn)品概述/Product Introduction:
本設備主要用于氧化鎵(Ga2O3)單晶生長,將原料放在留有狹縫的模具中,熔液借虹吸作 用上升到模具頂部,受籽晶誘導結(jié)晶生長成單晶。
This equipment is mainly used for gallium oxide (Ga2O3) single crystal growth, the raw material is placed in the mold with a slit, the molten liquid rises to the top of the mold by siphoning, and is induced by the seed crystals to crystallize and grow into a single crystal.
產(chǎn)品特點/Product Characteristics:
♦ 產(chǎn)量:2-6英寸
Capacity:2-6 inches
♦最高溫度:1900℃
Maximum temperature:1900°C
♦配置:上稱重方式 精度:10mg
Configuration:Upper weighing method accuracy:10mg
♦加熱方式:RF
Heating method:RF
♦氣體:3路
Air Circuit:3 ways
♦襯底:2英寸
Substrate:2 inches
♦XRD半高峰寬:≤150arcsec
XRD half peak width:≤150arcsec
♦位錯密度:≤1×104cm-2
Dislocation density:≤1×104cm-2
♦載流子濃度:1×1018—2×1019cm-3(導電型)
Carrier concentration:1×1018-2×1019cm-3(conductive)
♦電阻率:≥1×1010Ωcm(半絕緣)
Resistivity:≥1×1010Ωcm(semi-insulating)
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